GB/T 25915.13-2022
潔凈室及相關受控環境 第13部分:達到粒子和化學潔凈度要求的表面清潔
Cleanrooms and associated controlled environments—Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
GBT25915.13-2022, GB25915.13-2022