BS ISO 13083-2015 表面化學分析. 掃描式探針顯微術. 電子掃描式探針顯微術 (ESPM), 例如用于二維摻雜成像等用途的SSRM和SCM, 中空間分辨率的定義和校準標準
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes