ISO 18516-2006
表面化學分析.俄歇電子光譜法和X射線光電子光譜法.橫向分辨率測定

Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution

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標準號

ISO 18516-2006

發布日期

2006年11月

實施日期

廢止日期

無

中國標準分類號

G04

國際標準分類號

71.040.40;71.040.50

發布單位

IX-ISO

被代替標準

ISO/DIS 18516-2005

適用范圍

This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 μm. The grid method is suitable if the lateral resolution is expected to be less than 1 μm but more than 20 nm. The goldisland method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm. Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.

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