KS D ISO 19319-2005(2020)
表面化學分析-俄歇電子能譜和X射線光電子能譜-分析儀橫向分辨率、分析面積和樣品面積的測定
Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution, analysis area, and sample area viewed by the analyzer